@article{ Chen-Da:327, author = { Chen-Da, LI De-Hua, SONG Hong-Wei, WANG Cui-Ling, ZHANG Yu-Ping}, title = {AlN Thin Film Resonator Operated in Thickness Shear Mode Excited by Lateral Electric Field}, publisher = {Journal of Shanghai Jiao Tong University}, year = {2011}, journal = {Journal of Shanghai Jiaotong University}, volume = {45}, number = {03}, eid = {327}, numpages = {3}, pages = {327}, keywords = {
film bulk acoustic resonator； shear mode； AlN film
}, url = {https://xuebao.sjtu.edu.cn/EN/abstract/article_39583.shtml}, doi = {} }